Job Deck Generation
In order to array the images onto the mask, a job deck must be produced. The production of the job deck is automated by a small program called arraygen.exe. Here are the base assumptions we have made when writing arraygen:
the mask is rectangular
the margins for the mask are equal on all sides
the cell size is constant
a gap (or street) between cells may be specified - it must be equal in X and Y
the cell names indicate their position in the array as follows:
NNNNNX1Y1.mbs <-- number of characters to left of .mbs should be 9 total.
The portion of the file name for an image can have any valid characters except for X,x in the portion shown as NNNNNN. The character X must be present and is immediately follwed by a positive integer indicating the X position in the array. The character Y follows and is followed by a positive integer indicating the Y position in the array.
This allows the user to control the relative position of each cell by properly naming it.
MEBES and JOB DECK FILE NAMING RULES
During testing of this program we noticed that the CATS software used by most mask shops imposes stringent contstraints in file names used within the job deck. Therefore one must follow the same constraints when naming the TIFF files which will be converted into MEBES.
All Upper Case
All text strings in the job deck must be upper case which requires that all files referenced by the job deck are in upper case. This includes any strings in COMMENT lines.
Pattern File Name Convention
The name of the pattern file (i.e. the cell) must follow one of the following conventions:
We recommend that when running the arraygen program that the -fixname command line argument is always used as it will produce the correct convention in the job deck and will also rename the MEBES (i.e. pattern files)