Sizing

The sizing operation grows or shrinks all edges of the polygons. It is not the same as scaling. Sizing is often used to compensate for process related shrinkage or growth. The mask data is compensated in the opposite direction so that the final results are equal to the intended size.

Sizing can pose various difficulties - the sizing amount generally should be much smaller than the smallest feature size in the set of polygons. Acute angles should also be clipped or smoothed.

dialog box settings for sizing up 1 um

Settings to achieve 1 um positive sizing.

  before sizing operation

Mask data prior to sizing. Ignore the frame.



Sized Masks Overlayed over Original

Composite image of the original data and the +1 um and -1 um sized data.

  Zoom in View: Sized Masks Overlayed over Original

Zoomed in for a closer look; you can clearly see the +1 um and -1 um outlines. The smallest feature size in the original mask data is about 5 um.





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