|
Sizing is an operation that grows or shrinks all edges of the polygons. It is not the same as scaling.
Sizing is generally used to compensate for process related shrinkage or growth. The mask data is compensated
in the opposite direction so that the final results are equal to the intended size. Sizing can pose various difficulties - for example the sizing amount generally should be much smaller than the smallest feature size in the set of polygons. Very actute angles must also be clipped. There are also some issues to deal with when the sizing value and the database grid value are the same or very close.
|
 Mask data prior to sizing. Ignore the frame. |
|
Here are the settings for the dialog box to achieve the 1 um positive sizing. |
|
A composite image of the original mask outline and the +1 um and -1 um sized masks
|
|
Zoomed in for a closer look; you can clearly see the +1 um and -1 um outlines. The smallest feature size in the original mask data is about 5 um. |
|
| QckBool Page | Download | Revision History | Price |
|
ARTWORK CONVERSION SOFTWARE, INC. Company Profile 417 Ingalls St., Santa Cruz, CA 95060 Tel (831) 426-6163 Fax 426-2824 email: info@artwork.com |