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Introduction

Wafer maps are used in the back end of the IC manufacturing process to annotate the die on a wafer - the annotation may indicate whether the die is good or bad, the "grade" of the device or whether this device is a reference device.

WMapEdit (Wafer Map Editor) enables an engineer to view, edit and convert wafer maps from one format to another.

WMapEdit display of a STIF wafer map

Figure 1: WMapEdit displaying a STIF wafer map. The program enables the user to pan and zoom. Placing the cursor over a device provides a readout of the physical location, the array position and the bin code.


Supported Input Formats

SEMI E-142 (XML)

IBIS (SEMI G81/G85)

.ASY

.STIF

.EM

SINF

Supported Output Formats

1 DIGIT

SEMI E-142

IBIS (SEMI G81/G85)

SINF

Other Formats

Formats not currently supported but of future interest ...

Electroglas (Binary)

TEL P8 Prober (Binary)

Tel P8 (ASCII)

Cascade Microtech PA200

TI WWF

Additional input and output formats will be added as our customers request them.


Features

Modular

WmapEdit uses the WMapConvert conversion engine for reading and writing map files. When an enhancement is added to WMapConvert, WMapEdit is easily updated to support the new formats.

Pan and Zoom

The user can pan and zoom to examine small sections of the wafer map. This is especially helpful for small die where a single wafer may have 10,000 devices on it.

User Defined Colors

User can set the color of each bin code in order to more clearly display the wafer's yield pattern.

Transformation

WmapEdit enables the user to apply a rotational transformation. This is useful when the data is presented with the wafer flat in one orientation but the target machine requires a different orientation.

Bin Code Editing

The user can modify the bin code of any device. Useful when an incoming wafer map does not identify a reference device correctly.

Export to Other Formats

The user can import one format and then convert and export to a different format.


Glossary of Terms

Various Map formats use different terms for parameters and measurements. Out glossary of terms provides some details on terms used and can help when converting from one format to another.






ARTWORK CONVERSION SOFTWARE, INC.
417 Ingalls St. Unit C, Santa Cruz, CA 95060 831.426.6163  email: info@artwork.com