The SEMI G85 wafer map (XML) is broken into a number of sections - each describes a portion of the data needed to describe a wafer map.
| Parameter | Required? | Description |
|---|---|---|
| xmlns:semi | N | link to the XML schema |
| WaferId | Y | Wafer Identifier |
| FormatRevision | Y | describes the name of this format |
| Parameter | Required? | Description |
|---|---|---|
| ProductId | N | production idenfication |
| WaferSize | N | Wafer Diameter |
| LotId | Y | the wafer lot identification |
| CreateDate | N | file creation date |
| SupplierName | N | wafer supplier |
| Rows | Y | number of rows in the map |
| Columns | Y | number of columns in the map |
| Orientation | Y | location of wafer flat/notch |
| OriginLocation | Y | Location of the array origin (0,1,2,3) |
| BinType | Y | type of bin code: decimal, |
| NullBin | Y | code used for null die positions |
There are multiple bin sections -- one for each bin code. No entry is needed for the "null" bin.
| Parameter | Required? | Description |
|---|---|---|
| BinCode | Y | value assigned to this bin (see BinType) |
| BinCount | Y | Number of Devices in this bin |
| BinQuality | Y | Pass or Fail |
| BinDescription | N | user description |
All the parameters in this section are optional. However we don't know if you can completely omit this section.
| Parameter | Required? | |
|---|---|---|
| ProductCode | N | |
| RecipeName | N | |
| ToolType | N |
The map data is located here ...
| Parameter | Required? | |
|---|---|---|
| MapName | N | An optional map name if needed |
| Version | N | a version number |
| ROW | Y | Each ROW is followed by a list of bin codes. The number of items should match the Columns defined in the Device Section. The number of ROW lines should match the Rows defined in the Device Section. |
An example G85 file is shown below. The row and column section has been "clipped" so that the data fits better onto the page.
<?xml version="1.0" encoding="utf-8"?>
<Maps>
<Map
xmlns:semi="http://www.semi.org"
WaferId="XXXXXXXX-0001"
FormatRevision="G85-1101"
>
<Device
ProductId=""
WaferSize=""
LotId="999999"
CreateDate=""
SupplierName=""
Rows="26"
Columns="54"
Orientation="0"
OriginLocation="3"
BinType="Decimal"
NullBin="255"
>
<Bin
BinCode="000"
BinCount="0"
BinQuality="Fail"
BinDescription="No Pick Site"
/>
<Bin
BinCode="001"
BinCount="1097"
BinQuality="Pass"
BinDescription="Pick"
/>
<Bin
BinCode="091"
BinCount="2"
BinQuality="Fail"
BinDescription="Ugly"
/>
<SupplierData
ProductCode=""
RecipeName=""
ToolType=""
/>
<Data MapName="" Version="2">
<Row><![CDATA[255 255 255 255 255 255 255 255 255 255 255 255 255 255 255 001 001 ]]></Row>
<Row><![CDATA[255 255 255 255 255 255 255 255 255 255 001 001 001 001 001 001 001 ]]></Row>
<Row><![CDATA[255 255 255 255 255 255 001 001 001 001 001 001 001 001 001 001 001 ]]></Row>
<Row><![CDATA[255 255 255 255 001 001 001 001 001 001 001 001 001 001 001 001 001 ]]></Row>
<Row><![CDATA[255 255 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 ]]></Row>
<Row><![CDATA[001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 ]]></Row>
<Row><![CDATA[001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 ]]></Row>
<Row><![CDATA[001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 ]]></Row>
<Row><![CDATA[001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 ]]></Row>
<Row><![CDATA[001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 ]]></Row>
<Row><![CDATA[001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 ]]></Row>
<Row><![CDATA[001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 ]]></Row>
<Row><![CDATA[001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 001 ]]></Row>
</Data>
</Device>
</Map>
</Maps>