Example of SEMI E142 Wafer Map

In 2005, SEMI approved the E142 specification for a wafer map database. E142 is, like most modern specifications, XML based.

Here are the basic sections needed to properly define a wafer map for our converter.

XML Identification

<?xml version="1.0" encoding="UTF-8"?>

this is always present to identify as XML and indicate that encoding is UTF-8.


Map Data

<MapData xmlns="urn:semi-org:xsd.E142-1.V0105.SubstrateMap">

This line identifies the file as containing map data per the SEMI spec. It never changes from file to file.


Layouts

In this section a layout is identified, the units are defined and a product is identified. The array dimensions are identified as well as the step size. SEMI 142 allows multiple layouts to be defined. Layouts may also refer to child layouts.

<Layouts>
        <Layout LayoutId="LAYOUT_NAME" DefaultUnits="UNITS">
            <ProductId>PRODUCT_NAME</ProductId>
            <Dimension X="NUMBER OF COLUMNS" Y="NUMBER OF ROWS"/>
            <StepSize X="STEPX" Y="STEPY" Units="UNITS"/>
        </Layout>
</Layouts>

Substrates

SEMI E142 allows multiple substrates; however when used for a wafer map there will likely be only one. The fields in this section are not needed for conversion other than to identify the substrate type as a wafer.

<Substrates>
        <Substrate SubstrateType="Wafer" SubstrateId="ID OF THE SUBSTRATE">
            <LotId>IF PART OF A LOT PUT INFO HERE</LotId>
            <SlotNumber>IDENTIFIES THE SLOT POSITION</SlotNumber>
            <GoodDevices>COUNT OF GOOD DEVICES</GoodDevices>
        </Substrate>
</Substrates>

Substrate Maps

This section defines the various bin codes followed by the actual array of die bin codes. For a simple wafer map there will be only one map section. It must "point" to an existing layout. It is possible for a multi-product wafer (MPW) that there could be multiple maps linked to multiple layouts.


<SubstrateMaps>
        <SubstrateMap 
            SubstrateType="Wafer" 
            SubstrateId="ENTER AN ID HERE"
            SubstrateSide="TopSide"
            Orientation="0"
            OriginLocation="UpperLeft" 
            AxisDirection="DownRight">
            

Bin Code Map

This section defines the various bin codes. At a minimum one needs null die, good die (pass) and bad die (fail). Typically in addition to these three codes, there can be codes for different types of failures, for alignment die, for test devices ....

SEMI E142 supports different types of bin codes.


<BinCodeMap BinType="HexaDecimal" NullBin="F0">

<BinDefinitions>
    <BinDefinition BinCode="01" BinDescription="01"   BinQuality="Pass"/>
    <BinDefinition BinCode="02" BinDescription="02"   BinQuality="Fail"/>
    <BinDefinition BinCode="FF" BinDescription="Edge" BinQuality="Fail"/>
</BinDefinitions>


Bin Codes

This section contains the bin codes. SEMI 142 supports a number of different approaches to arranging the bin codes. The example below is called a 2D Array.


<BinCode>F0F0F0F0F0F0FFFFFF0101010101010...101010101010102FFFFF0F0F0F0F0F0F0</BinCode>
<BinCode>F0F0F0F0F0FFFFFFFF0101010101010...1010101010101010102FFFFFFF0F0F0F0F0F0</BinCode>
<BinCode>F0F0F0F0F0FFFFFF010101010101010...010101010101010101010101010102FFFFF0F0F0F0F0F0</BinCode>
<BinCode>F0F0F0F0F0FFFFFF010101010101010...010101010101010101010101010201FFFFF0F0F0F0F0F0</BinCode>
<BinCode>F0F0F0F0FFFFFF01010101010101010...02010101010101020101010101010102FFFFF0F0F0F0F0</BinCode>
<BinCode>F0F0F0F0FFFF0101010101010101010...01010101010101010101010201010101FFFFF0F0F0F0F0</BinCode>
<BinCode>F0F0F0F0FFFF0101010101010101010...01010101010101010101010101010101FFFFF0F0F0F0F0</BinCode>

Closing Out

At the end of the XML file all open sections must be closed out.
                </BinCodeMap>
            </Overlay>
        </SubstrateMap>
    </SubstrateMaps>
</MapData>




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