The Care Area Wizard (CAW) is a Qckvu3 plug-in application that enables a yield engineer to quickly define regions of interest (care areas) on a chip layout. The resulting collection of "Care Areas" are passed to a KLA-Tencor Wafer inspection machine.

The basis for selecting these care areas depends on selecting cell outlines and filtering the selection by the cell's position in either a particular window or by the cell's parent or location in the database hierarchy.

Once a set of Care Areas has been defined, the program can resize them if necessary and can merge touching or closely spaced regions.

Output consists of a GDSII file populated with Care Area rectangles, along with a mapping.csv file and a config.csv file and two bitmapped images of registration sites.

The CA Wizard is available on 64 bit Linux OS.